Stage 01 / Excitation
Pure silicon creates the impulse.
Muir's silicon membrane provides the initial acoustic excitation. Its compact silicon architecture allows the surrounding acoustic network to become a dominant part of the system response.
- Source
- xMEMS Muir
- Actuation
- Piezoelectric MEMS
- Role
- Excitation
- Silicon fin
- Piezo layer
- Compression
- Rarefaction
- Illustrative · slowed






